The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Jun. 12, 2003
Applicants:
Wilson Smart, Palo Alto, CA (US);
Kumar Subramanian, Pleasanton, CA (US);
Eugene Orloff, Berkeley, CA (US);
Inventors:
Wilson Smart, Palo Alto, CA (US);
Kumar Subramanian, Pleasanton, CA (US);
Eugene Orloff, Berkeley, CA (US);
Assignee:
Kumetrix, Inc., Union City, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D003/02 ; C23F001/00 ;
U.S. Cl.
CPC ...
Abstract
A silicon penetration device with increased fracture toughness and method of fabrication thereof are provided. The method comprises strengthening silicon penetration devices by thermally growing a silicon oxide layer on the penetration device and then subsequently stripping the silicon oxide. The method also includes strengthening silicon penetration devices through the sputtering of thin film coatings on the silicon penetration devices.