The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Nov. 14, 2002
Corrado Carretti, Milan, IT;
Giorgio Longoni, Monza, IT;
Corrado Carretti, Milan, IT;
Giorgio Longoni, Monza, IT;
SAES Getters S.p.A., Lainate, IT;
Abstract
The present invention relates to a process for depositing a calcium getter thin film inside a system operating under vacuum. The process comprises the steps of introducing into the system under vacuum at least one evaporable getter device with an air-stable calcium compound. The system is evacuated until a pressure value Pis reached. The system is then heated up to the calcium evaporation temperature of the stable compound. The system evacuation continues until a pressure value P, which is lower than P, is reached and the system is sealed. In a preferred embodiment, the heating step separates the two evacuation steps.