The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2005
Filed:
Sep. 26, 2002
Tsuyoshi Takegami, Tokyo, JP;
Hisaaki Kawade, Kanagawa, JP;
Takahiro Oguchi, Kanagawa, JP;
Kazuhiro Jindai, Kanagawa, JP;
Tsuyoshi Takegami, Tokyo, JP;
Hisaaki Kawade, Kanagawa, JP;
Takahiro Oguchi, Kanagawa, JP;
Kazuhiro Jindai, Kanagawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
It relates to a method of manufacturing an electron source. In an activation process, a set value of an activation gas partial pressure is switched at multi-stages and an application of a compensation voltage is not conducted for a predetermined period after switching of the set value. Alternatively, the activation is repeated plural times while a row wiring or a column wiring is switched, and the application of the compensation voltage is not conducted for the predetermined period after switching of the row wiring or the column wiring. Thus, activation processing can be uniformly performed for all electron emitting devices.