The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
Apr. 17, 2002
Hideyuki Hashi, Osaka, JP;
Taizou Hamada, Osaka, JP;
Tatsuaki Ishida, Shiga, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
Instead of directly performing defect inspection using a master information carrier, an inspection substrate is prepared to then bring the master information carrier in close contact therewith, to thereby transfer a defect on the master information carrier to the inspection substrate, thus indirectly inspecting any defect of the master information carrier on the inspection substrate. Defect inspection is performed on the first-state inspection substrate before close contacting, so that a defect inspection result on the second-state inspection substrate after close contacting and that on the first-state inspection substrate are compared to each other.