The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
May. 12, 2003
Jun Ishikawa, Ohi-machi, JP;
Hiroyuki Nagasaka, Sagamihara, JP;
Naomasa Shiraishi, Urawa, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The energy amount of the energy beam passing through the illumination optical system is detected with the first photosensor, whereas the energy amount of the energy beam EL passing through at least a portion of the projection optical system PL is detected. And in accordance with the detection results, the main controller controls the exposure amount provided on the substrate during exposure. In the case the transmittance of the energy beam in the optical path from the first photosensor to the substrate surface (image plane) changes, this change is substantially precisely reflected to a value obtained by dividing the detection value of the second photosensor by the detection value of the first photosensor and normalizing the result. Accordingly, the transmittance change of the optical system in the optical path can be substantially cancelled out, allowing an exposure amount control with high precision.