The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 01, 2005

Filed:

May. 20, 2003
Applicants:

Bruce J Oberhardt, Raleigh, NC (US);

Stephen W. Smith, Durham, NC (US);

Jason Michael Zara, Vienna, VA (US);

Inventors:

Bruce J Oberhardt, Raleigh, NC (US);

Stephen W. Smith, Durham, NC (US);

Jason Michael Zara, Vienna, VA (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2714 ; H01L 2982 ; H01L 2984 ;
U.S. Cl.
CPC ...
Abstract

Microelectromechanical (MEMS) oscillatory devices are placed adjacent a face of a microelectronic sensor platform and configured to oscillate to improve transport to the sensor of substances to be detected. The MEMS oscillatory devices can be configured to oscillate to disrupt the boundary layer that is formed adjacent the face of the microelectronic sensor platform, which may improve sensor performance. MEMS oscillatory devices may be far less susceptible to wear and breakdown than MEMS rotary devices, such as fans.


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