The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 01, 2005

Filed:

May. 04, 2004
Applicants:

Tetsuro Endo, Ota, JP;

Hirotoshi Iwase, Gunma, JP;

Seizo Kato, Ogaki, JP;

Masatoshi Ochiai, Mizuho, JP;

Inventors:

Tetsuro Endo, Ota, JP;

Hirotoshi Iwase, Gunma, JP;

Seizo Kato, Ogaki, JP;

Masatoshi Ochiai, Mizuho, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1600 ; C23C 1400 ; F27B 1412 ; F27B 1414 ;
U.S. Cl.
CPC ...
Abstract

When electric current is caused to flow in an electric heater which is disposed on an elongated crucible, an evaporation material stored within the crucible and located under the electric heater is heated and the evaporation material is vaporized and discharged through an opening of the electric heater. Because a metal coating is applied to the outer surface of the elongated crucible, external radiation of heat from the crucible is reduced, and the heat generated by the electric heater is more efficiently used to increase the temperature of the evaporation material. In this manner, efficient heating for the interior of the elongated crucible and uniform temperature within the crucible can be achieved.


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