The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
May. 02, 2002
Bryan S. Shelton, Bound Brook, NJ (US);
Mark Gottfried, Hillsborough, NJ (US);
Stephen Schwed, Bridgewater, NJ (US);
Ivan Eliashevich, South Orange, NJ (US);
Bryan S. Shelton, Bound Brook, NJ (US);
Mark Gottfried, Hillsborough, NJ (US);
Stephen Schwed, Bridgewater, NJ (US);
Ivan Eliashevich, South Orange, NJ (US);
Abstract
A method of protecting and cleaning a semiconductor wafer using laser ablation includes the following steps: applies a protective coating on the side to be cut of a wafer with sapphire substrate, mounts the other side of the sapphire wafer on an adhesive tape, mounts the sapphire wafer on a cutting table, cuts the sapphire wafer with a laser, breaks the sapphire wafer into die, and cleans the sapphire wafer with a cleaning solution that removes slag resulting from the cutting, debris resulting from the breaking, and the protective coating, but the adhesive tape, the cleaning solution, and the protective coating are selected such that the cleaning solution does not damage the adhesive tape.