The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
May. 04, 2001
Applicants:
Andreas Klöppel, Glauburg, DE;
Jutta Trube, Mombris, DE;
Inventors:
Andreas Klöppel, Glauburg, DE;
Jutta Trube, Mombris, DE;
Assignee:
Unaxis Deutschland GmbH, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1434 ;
U.S. Cl.
CPC ...
Abstract
A process for the deposition of transparent and conductive indium-tin oxide (ITO) films with a particularly low resistance of preferably less than 200 μΩcm and a small surface roughness of preferably less than 1 nm on a substrate, wherein combined HF/DC sputtering of an indium-tin oxide (ITO) target is employed and wherein the process gas is supplemented by an argon/hydrogen mixture as reaction gas during the sputtering, as well as ITO-films with the above-named characteristics.