The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
Jan. 12, 2001
Daniel J. Babbs, Austin, TX (US);
William J. Fosnight, Austin, TX (US);
Tim Cosentino, Waitsfield, VT (US);
Mark Sammut, Shelburne, VT (US);
Pascal Pinna, Burlington, VT (US);
Russell Zemen, Austin, TX (US);
Daniel J. Babbs, Austin, TX (US);
William J. Fosnight, Austin, TX (US);
Tim Cosentino, Waitsfield, VT (US);
Mark Sammut, Shelburne, VT (US);
Pascal Pinna, Burlington, VT (US);
Russell Zemen, Austin, TX (US);
Asyst Technologies, Inc., Fremont, CA (US);
Abstract
A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed container reticle stockers, or both. In embodiments of the present invention, the reticle management system includes between one and six individual bare reticle stockers and/or closed container stockers for storing reticles affixed to a reticle sorter. The sorter includes a reticle inspection station for inspecting the reticles, a plurality of input/output (I/O) load ports and a reticle handling robot for transferring the reticles between the stockers, the inspection station and the I/O load ports. The management system further includes a control unit for housing control electronics for the system.