The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
Apr. 23, 2003
Kyoung Soo Kim, Kyungki-do, KR;
Kyoung Soo Kim, Kyungki-do, KR;
Abstract
The present invention is an apparatus and method for making output signal (AC voltage) levels of MEMS capacitive sensors uniform, each including a microstructure being displaced by a certain force and a fixed electrode for detecting capacitance variation caused by gap size difference between the microstructure and the fixed electrode, the apparatus and method comprising so as to apply actuating current of a predetermined frequency to the microstructure, output a sensing signal of the fixed electrode while receiving a reference offset voltage, compare an RMS level of the sensing signal with a preset RMS level, and then adjust the reference offset voltage of the fixed electrode so that the sensing signal made equal to a target level.