The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
May. 13, 2002
Kyung-ho Shin, Seoul, KR;
Woo-young Lee, Seoul, KR;
Young-joon Park, Seoul, KR;
Kyung-il Lee, Yongin, KR;
Jae-geun Ha, Seoul, KR;
Kyung-Ho Shin, Seoul, KR;
Woo-Young Lee, Seoul, KR;
Young-Joon Park, Seoul, KR;
Kyung-Il Lee, Yongin, KR;
Jae-Geun Ha, Seoul, KR;
Korea Institute of Science and Technology, Seoul, KR;
Abstract
A fabrication method of a magnetic tunnel junction includes the steps of: forming a magnetic tunnel junction constructed having a first magnetic layer, a tunnel barrier formed at an upper surface of the first magnetic layer and a second magnetic layer formed at an upper surface of the tunnel barrier; and thermally treating the junction rapidly for 5 seconds˜10 minutes at a temperature of 200˜600° C. to re-distribute oxygens in the tunnel barrier and make the interface between the tunnel barrier and the magnetic layer to be even. The tunneling magnetoresistance and thermal stability of the magnetic tunnel junction can be improved through the rapid thermal annealing.