The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Aug. 04, 2003
Chris D. Atkinson, Lewisville, TX (US);
Keith W. Melcher, McKinney, TX (US);
Richard L. Guldi, Dallas, TX (US);
Chris D. Atkinson, Lewisville, TX (US);
Keith W. Melcher, McKinney, TX (US);
Richard L. Guldi, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A photolithography system includes a photolithography toolthat includes a stage upon which a semiconductor wafer is mounted. The tool is operable to move the stage to automatically focus a pre-determined image on a surface of the semiconductor wafer. The tool is further operable to log movements of the stage. The system also includes an automation host computeroperable to poll the photolithography toolto obtain data reflecting the logged movements of the stage. The automation host computeris further operable to analyze the data and compare the data to pre-determined error conditions. The host computer also takes a pre-determined action, including sending an electronic mail message to the personal computersof relevant line personnel, in the event the data meets the pre-determined error conditions.