The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Nov. 06, 2001
Tadahiro Ohmi, Sendai-shi, Miyagi-ken, JP;
Hiroshi Osawa, Tochigi-ken, JP;
Nobuyoshi Tanaka, Tokyo, JP;
Kazuhide Ino, Kyoto, JP;
Toshikuni Shinohara, Miyagi-ken, JP;
Yasuyuki Shirai, Miyagi-ken, JP;
Masaki Hirayama, Miyagi-ken, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi-ken, JP;
Hiroshi Osawa, Tochigi-ken, JP;
Nobuyoshi Tanaka, Tokyo, JP;
Kazuhide Ino, Kyoto, JP;
Toshikuni Shinohara, Miyagi-ken, JP;
Yasuyuki Shirai, Miyagi-ken, JP;
Masaki Hirayama, Miyagi-ken, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Other;
Abstract
A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outletand a laser gas is controlled to a predetermined subsonic speed at a throat portion. Gas supplies for controlling the speed of the gas are connected each to the fluid inlet and to the fluid outlet of the gas supply path structure and, together with a cooling device, compose a circulation system for controlling the speed and pressure of the laser gas at the fluid inlet and/or at the fluid outlet.