The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Dec. 10, 2002
Gordon Janaway, Tucson, AZ (US);
Steven Coyle, Alameda, CA (US);
Gordon Janaway, Tucson, AZ (US);
Steven Coyle, Alameda, CA (US);
Applied Matrials, Inc., Santa Clara, CA (US);
Abstract
An electron beam source has a photocathode with a photoemitter material having a work function, and with a beam receiving portion and an electron emitting portion. A first light source directs a first light beam onto the beam receiving portion of the photocathode to generate an electron beam from the electron emitting portion. The first light beam has a wavelength λsuch that hc/λis at least about the work function of the photoemitter material, where 'h' is Planck's constant and 'c' is the speed of light. A second light source directs a second light beam onto the beam receiving portion of the photocathode, such as onto the beam receiving portion, to stabilize the electron beam. The second light beam having a wavelength λsuch that hc/λis less than about the work function of the photoemitter material.