The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
May. 19, 2004
Rajanikant Jonnalagadda, Granger, IN (US);
Brian J. Miller, Mishawaka, IN (US);
Rajanikant Jonnalagadda, Granger, IN (US);
Brian J. Miller, Mishawaka, IN (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
A method and apparatus for sealing gas ports in CVD/CVI furnaces and processes is disclosed. A fluid direction nozzle () is positioned between a top lip () of a gas inlet port () delivering a reactant gas (G) to a furnace compartment() in a CVD/CVI furnace () and corresponding holes () of a CVD/CVI process apparatus such as a hearth plate (). The fluid direction nozzlereduces leakage of reactant gases (G) and ensures a smooth transition of gas flow direction between the gas inlet port () and the corresponding holes (). CVD/CVI process times are significantly reduced with the use of the reusable/replaceable flow direction nozzles ().