The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Mar. 14, 2002
Applicants:
Leon Mccaughan, Madison, WI (US);
Thomas F. Kuech, Madison, WI (US);
Dovas A. Saulys, Madison, WI (US);
Vladimir A. Joshkin, Madison, WI (US);
Aref Chowdhury, Springfield, NJ (US);
Inventors:
Leon McCaughan, Madison, WI (US);
Thomas F. Kuech, Madison, WI (US);
Dovas A. Saulys, Madison, WI (US);
Vladimir A. Joshkin, Madison, WI (US);
Aref Chowdhury, Springfield, NJ (US);
Assignee:
Wisconsin Alumni Research Foundation, Madison, WI (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C 122 ; C03C 1500 ; C03C 2568 ; C23F 100 ; C25F 300 ;
U.S. Cl.
CPC ...
Abstract
Metal oxide films such as lithium niobate are formed in an amorphous state on a substrate such as lithium niobate and can be readily etched by conventional liquid or dry etchants. The amorphous film may then be converted by annealing to a crystalline form well suited to formation of electro-optical devices.