The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Nov. 26, 2002
Andrew G. Huibers, Mountain View, CA (US);
Satyadev R. Patel, Elk Grove, CA (US);
Robert M. Duboc, Jr., Menlo Park, CA (US);
Andrew G. Huibers, Mountain View, CA (US);
Satyadev R. Patel, Elk Grove, CA (US);
Robert M. Duboc, Jr., Menlo Park, CA (US);
Reflectivity, Inc, Sunnyvale, CA (US);
Abstract
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.