The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 18, 2005

Filed:

Jul. 31, 2001
Applicants:

Christopher M. Jones, San Francisco, CA (US);

Mira Ben-tzur, Sunnyvale, CA (US);

Allen Fung, San Francisco, CA (US);

Inventors:

Christopher M. Jones, San Francisco, CA (US);

Mira Ben-Tzur, Sunnyvale, CA (US);

Allen Fung, San Francisco, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2176 ; H01L 21301 ; H01L 2144 ; H01L 21461 ;
U.S. Cl.
CPC ...
Abstract

According to one embodiment, verifying a reticle may include patterning an inspected layer (-) according to a reticle pattern, depositing a contrast enhancing layer (-) on a patterned layer (-), and inspecting a reticle patterned formed in the inspected layer (-).


Find Patent Forward Citations

Jones, Christopher. (2005). Reticle repeater monitor wafer and method for verifying reticles (U.S. Patent No. 6844235). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6844235

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…