The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Jun. 12, 2003
Jin Ming Su, Shanghai, CN;
Xiao Sheng Qiang, Shanghai, CN;
LI Zi Wang, Shanghai, CN;
Chin Te Hunag, Shanghai, CN;
Jin Ming Su, Shanghai, CN;
Xiao Sheng Qiang, Shanghai, CN;
Li Zi Wang, Shanghai, CN;
Chin Te Hunag, Shanghai, CN;
Abstract
A method for monitoring a dose of a silicon bearing implant is described. The method includes introducing a first implant species through a surface of a semiconductor substrate at a first does of energy level and introducing a silicon bearing species through the surface of the semiconductor substrate at a second dose and a second energy level. The method anneals the semiconductor substrate and measures a sheet resistance value of the surface of the semiconductor substrate. The method also determines the second dose value based upon the surface resistance value.