The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2005
Filed:
Aug. 29, 2002
Applicants:
Masanori Kosuda, Tokyo, JP;
Yoshihisa Tamagawa, Tokyo, JP;
Hideki Ishizaki, Tokyo, JP;
Inventors:
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16000 ; H01L 21000 ; B65G 4907 ;
U.S. Cl.
CPC ...
Abstract
A vacuum processing apparatusis provided with a bypass linefor causing a vacuum transfer chamberand a load-lock chamberto communicate with each other, and a bypass opening and shutting valvefor opening and shutting the corresponding bypass line, wherein by opening the bypass opening and shutting valve, a pressure-reduced state at the vacuum transfer chamberside can be shifted to the load-lock chamberside, and the pressure reduction of the load-lock chambercan be carried out in a short time.