The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Jun. 24, 2003
Applicants:
Yukihiro Morimoto, Hyogo, JP;
Tetuya Torikai, Hyogo, JP;
Takafumi Mizoziri, Hyogo, JP;
Inventors:
Assignee:
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 1900 ;
U.S. Cl.
CPC ...
Abstract
In a light heating apparatus having a flash lamp in which noble gas is enclosed, a casing surrounding the flash lamp, a stage where a silicon wafer on which light from the flash lamp is emitted is placed, and a power feeding apparatus for controlling light emission of the flash lamp, B/A is greater than 1.0 wherein integrated radiant intensity in a range from 220 to 370 nm wavelength is represented as A and integrated radiant intensity in a range from 370 to 800 nm wavelength.