The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Sep. 17, 2002
Andrew J. Hazelton, San Carlos, CA (US);
Shigeki Kageyama, Fukaya, JP;
Hidehiro Chida, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
Methods and apparatus for adjusting a push point of an actuator such that the push point more closely corresponds to a center-of-gravity of a stage being driven by the actuator are disclosed. According to one aspect of the present invention, a method for scanning a stage device which includes a stage, as well as an actuator which has a first coil and a second coil, includes driving the stage using the actuator and determining when driving the stage using the actuator includes driving the stage through a first location associated with the stage. The actuator is arranged to drive the stage through a push point associated with the first coil and the second coil. The method also includes altering the push point when it is determined that driving the stage using the actuator does not result in the stage being driven through the first location associated with the stage.