The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Sep. 16, 2003
Rudolf Beckmann, Hammersbach, DE;
Markus Fuhr, Eppstein, DE;
Walter Zultzke, Maintal, DE;
Werner Weinrich, Langenselbold, DE;
Rudolf Beckmann, Hammersbach, DE;
Markus Fuhr, Eppstein, DE;
Walter Zultzke, Maintal, DE;
Werner Weinrich, Langenselbold, DE;
Leybold Optics GmbH, Alzenau, DE;
Abstract
The invention relates to a plasma source whose plasma is ignited by an electric voltage. To be able to carry out the ignition at relatively low voltages, a plate () provided with holes () is provided beneath a plasma volume (), which is disposed above a wall () of a plasma chamber (). Through this plate () an ignition volume () is formed beneath the plasma volume () with a higher pressure than in the plasma volume (), in which the plasma ignites first. The ignition is subsequently propagated through the holes of the plate () into the plasma volume ().