The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Oct. 10, 2003
Fujio Yagihashi, Yokohama, JP;
Tomoyoshi Furihata, Kawasaki, JP;
Jun Watanabe, Kawasaki, JP;
Akinobu Tanaka, Atsugi, JP;
Yoshio Kawai, Isehara, JP;
Tadahito Matsuda, Atsugi, JP;
Fujio Yagihashi, Yokohama, JP;
Tomoyoshi Furihata, Kawasaki, JP;
Jun Watanabe, Kawasaki, JP;
Akinobu Tanaka, Atsugi, JP;
Yoshio Kawai, Isehara, JP;
Tadahito Matsuda, Atsugi, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Abstract
Disclosed are novel onium salts represented by general formula (R)SM, wherein three R's may be the same or different, each being an aryl group, provided that at least one of R's is a t-alkoxy substituted phenyl group, and M is an anion capable of forming the sulfonium salts; and high energy radiation-responsive positive resist materials using said novel onium salts as acid generator.