The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Mar. 18, 2002
Hiroki Kurisu, Ube, JP;
Mitsuru Matsuura, Ube, JP;
Setsuo Yamamoto, Ube, JP;
Masaki Hesaka, Ube, JP;
Atsushi Takemura, Tokyo, JP;
Hiroki Kurisu, Ube, JP;
Mitsuru Matsuura, Ube, JP;
Setsuo Yamamoto, Ube, JP;
Masaki Hesaka, Ube, JP;
Atsushi Takemura, Tokyo, JP;
Yamaguchi Technology Licensing Organization, Ltd., Yamaguchi, JP;
Shinko Industries Co., Ltd., Yamaguchi, JP;
Abstract
The objective of the present invention is to provide a titanium alloy vacuum container and vacuum parts that can easily achieve an ultra-high vacuum in a short time through vacuum evacuation. The titanium alloy of the titanium alloy vacuum container and vacuum parts has a compact structure composed of fine grains, each having a size of approximately not more than 10 μm, with a surface that is exposed to at least vacuum being set to have a surface roughness of not more than 50 nm; and in this structure, preferably, the surface roughness thereof may be set to not more than 10 nm, the titanium alloy may have a hardness in a range of not less than 230 Hv to not more than 310 Hv, and the titanium alloy may have a passivity surface film made by a thin titanium oxide layer or nitride layer that is formed on the surface thereof. The titanium alloy, which is desirably used in such titanium alloy vacuum container and vacuum parts, contains 0.3 wt. % to 0.5 wt. % of iron and 0.3 wt. % to 0.5 wt. % of oxygen, and the remainder thereof is made from Ti obligatory impurities.