The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Jul. 28, 1999
Thomas Jung, Hotzum, DE;
Thomas Jung, Hotzum, DE;
Fraunhofer-Gesellschaft zur Forderung, Munich, DE;
Abstract
The invention concerns a device and a method for coating and/or surface modification of objects in a vacuum using a plasma, where there is the possibility of coating or modifying variform objects on all sides without a large expense for plant or process engineering being necessary. In accordance with the invention, a box structure () of an electrically conductive material that forms a vacuum chamber or can be inserted into a vacuum chamber is used. Objects () can be introduced into the box structure to at least one closable opening () at a distance from the inner wall. In addition, there are at least one opening () for supply and at least one opening () for removal of the operating gas as well as one opening (') for introduction of energy for generation of a glow discharge and the box structure () has a potential that is electrically negative with respect to the plasma generated by the glow discharge.