The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 11, 2005

Filed:

Oct. 31, 2001
Applicants:

Robert S. Condrashoff, Walnut Creek, CA (US);

James P. Fazio, Concord, CA (US);

David E. Hoffman, Pittsburg, CA (US);

James S. Tyler, Galt, CA (US);

Inventors:

Robert S. Condrashoff, Walnut Creek, CA (US);

James P. Fazio, Concord, CA (US);

David E. Hoffman, Pittsburg, CA (US);

James S. Tyler, Galt, CA (US);

Assignee:

Nordson Corporation, Westlake, OH (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 100 ; H01L 21306 ; C23C 1600 ; B65G 4907 ;
U.S. Cl.
CPC ...
Abstract

A plasma treatment system in which untreated workpieces are serially received one at a time on an infeed table but stored in parallel on the infeed table. The untreated workpieces are transferred simultaneously, in parallel, into a plasma treatment chamber. Thereafter, treated workpieces are transferred simultaneously, in parallel, out of the plasma treatment chamber onto an outfeed table; and the outfeed table serially discharges the treated workpieces one at a time from the outfeed table.


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