The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Jul. 23, 2002
Tomomi Iwata, Kyoto, JP;
Yusuke Muraoka, Kyoto, JP;
Kimitsugu Saito, Kyoto, JP;
Ikuo Mizobata, Kyoto, JP;
Takashi Miyake, Kyoto, JP;
Ryuji Kitakado, Kyoto, JP;
Tomomi Iwata, Kyoto, JP;
Yusuke Muraoka, Kyoto, JP;
Kimitsugu Saito, Kyoto, JP;
Ikuo Mizobata, Kyoto, JP;
Takashi Miyake, Kyoto, JP;
Ryuji Kitakado, Kyoto, JP;
Abstract
With respect to any one of processing units, a main transportation path, a developing unit, a dedicated transportation robot and a high-pressure processing unit are disposed linearly in this order in a direction. Hence, even if a processing fluid adhering to a substrate or an evaporant of the processing fluid moves toward the main transportation path while the high-pressure processing unit transports the substrate wet with the processing fluid, there are the processing units located which the processing fluid or its evaporant must arrive at before reaching the main transportation path.