The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 11, 2005
Filed:
Apr. 08, 2003
Shuichi Hirasawa, Ibaraki, JP;
Katsumi Ishihara, Ibaraki, JP;
Masatoshi Morita, Ibaraki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a working method of performing work on a workpiece, a plurality of work chambers corresponding to work steps for the workpiece are consecutively arrayed, and a cleanliness with respect to dust particles is independently controlled in each of the work chambers. The workpiece is transferred to the respective work chambers, and working is performed in each of the work chambers in which a cleanliness is maintained below a predetermined cleanliness corresponding to the type of work on the workpiece.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile