The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Feb. 20, 2002
Applicants:
Benedict J. Costello, Berkeley, CA (US);
Peter T. Jones, Albany, CA (US);
Ho-shang Lee, El Sobrante, CA (US);
Inventors:
Benedict J. Costello, Berkeley, CA (US);
Peter T. Jones, Albany, CA (US);
Ho-Shang Lee, El Sobrante, CA (US);
Assignee:
Dicon Fiberoptics, Inc., Richmond, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2714 ; H01L 2982 ; H01L 2984 ;
U.S. Cl.
CPC ...
Abstract
An electrostatic actuator with inter-digital rotor and stator fingers formed in a the insulating and conductive layers of a wafer. The actuator is used to drive MicroElectroMechanical (MEMS) components, specifically micro-optical components such as mirrors, attenuators, switches, and tunable filters.