The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Oct. 17, 2002
Semiconductor devices having a non-volatile memory transistor and methods for manufacturing the same
Tomoyuki Furuhata, Sakata, JP;
Tomoyuki Furuhata, Sakata, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
Embodiments include a semiconductor device and a method for manufacturing the same, which simplify the manufacturing steps and provide split gate type non-volatile memory transistors and other device elements mounted on the same chip. In one method, the step of forming the lower electrode of a capacitorand the step of forming a floating gateof a memory transistorare conducted in different steps. As a result, characteristics of the floating gateand characteristics of the lower electrodecan be independently optimized. On the other hand, the step of forming a control gateof the memory transistorand the step of forming an upper electrodeof the capacitorare conducted in the same step. As a result, the manufacturing process is simplified.