The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 04, 2005
Filed:
Jun. 22, 1999
Taisuke Hirooka, Hyogo, JP;
Hidetaka Sakumichi, Hyogo, JP;
Taisuke Hirooka, Hyogo, JP;
Hidetaka Sakumichi, Hyogo, JP;
Neomax Co., Ltd., Osaka, JP;
Abstract
A cleaning apparatus of an electronic component of the present invention comprises: means for supplying cleaning water to an object to be cleaned such as alumina titanium carbide wafer, a sponge member for contacting with the object to be cleaned to clean a surface thereof, means for moving the object to be cleaned and the sponge member relative to each other, and means for adjusting the resistivity value of the cleaning water to 10MΩ or less. Using this apparatus, the object to be cleaned is cleaned using the sponge member while supplying, to the object to be cleaned, cleaning water having the resistivity value of 10MΩ or less. In this case, the cleaning degree is enhanced by soaking the object to be cleaned in the water having the resistivity value of 10MΩ or less before cleaning, and by using a dummy substrate.