The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2004
Filed:
Jan. 10, 2003
Applicant:
Inventors:
Dae-Gab Gweon, Daejon, KR;
Ki-Hyun Kim, Daejon, KR;
Assignee:
Korea Advanced Institute of Science and Technology, Daejon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02K 4/100 ; H01L 2/100 ;
U.S. Cl.
CPC ...
H02K 4/100 ; H01L 2/100 ;
Abstract
An apparatus for precisely driving X-Y stages using and plate springs a VCM (Voice Coil Motor) performing biaxial movement in relation to a specimen transferring apparatus used in a microscope. The apparatus includes X and Y axis stages of the same structure, each of which has a part driving on both fixed sides and a part connected to the driving part by an elastic member and driving in the same direction as the driving part, and magnetic force generators connected to the stages respectively for providing the stages with driving force.