The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 28, 2004
Filed:
May. 14, 2001
Nam-Heon Kim, Suwon-shi, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
There is provided an EML (an electro-absorption modulator integrated laser) fabricating method for optical communication in which a compound semiconductor structure with a laser diode directly combined with a modulator is prepared simultaneously, a two step InP layer is formed on the compound semiconductor structure, an InGaAs layer is formed on the InP layer, a mask layer is formed in a trench between the laser diode and the modulator, Zn or a Zn compound is deposited in a metal contact forming area on the laser diode and the modulator except for the trench and diffusing the Zn, and the mask layer and InGaAs layer are selectively etched to a predetermined depth.