The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2004
Filed:
Jun. 16, 2003
Applicant:
Inventors:
Marvin Glenn Wong, Woodland Park, CO (US);
Ling Liu, Colorado Springs, CO (US);
Assignee:
Agilent Technologies, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01H 2/900 ;
U.S. Cl.
CPC ...
H01H 2/900 ;
Abstract
A suspended thin-film resistor and methods for producing the same are disclosed. In one embodiment, a device is produced by depositing a first and second contact on a substrate, depositing a sacrificial material on the substrate at a location between the first and second contacts, depositing a thin-film resistor over the first and second contacts and the sacrificial material, and thermally decomposing the sacrificial material.