The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2004
Filed:
May. 23, 2002
Kazutaka Yanagita, Kanagawa, JP;
Mitsuharu Kohda, Kanagawa, JP;
Kiyofumi Sakaguchi, Kanagawa, JP;
Akira Fujimoto, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention is to support a plate member such as a bonded substrate stack in a horizontal state without coming into contact with one surface of the member and also to efficiently progress separation. Separation is executed while arranging a bonded substrate stack ( ) generated by bonding a seed substrate ( ) to a handle substrate ( ) such that the seed substrate ( ) remains on the lower side. At the first stage, the peripheral portion is separated while causing a first substrate support section ( ) to chuck and support the central portion of the lower surface of the bonded substrate stack ( ). Then, at the second stage, the central portion is separated while causing a second substrate support section ( ) to support the lower peripheral portion and side of the bonded substrate stack ( ).