The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2004
Filed:
Oct. 30, 2003
Samuel Lee Miller, Albuquerque, NM (US);
Murray Steven Rodgers, Albuquerque, NM (US);
Stephen Matthew Barnes, Albuquerque, NM (US);
Jeffry Joseph Sniegowski, Edgewood, NM (US);
Paul Jackson McWhorter, Albuquerque, NM (US);
MEMX, Inc., Albuquerque, NM (US);
Abstract
The present invention provides a MEM system ( ) having a platform ( ) that is both elevatable from the substrate ( ) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate ( ). In one embodiment, the MEM system ( ) includes the platform ( ), a pair of A-frame structures ( ), and two pairs of actuators ( ) formed on the substrate ( ). Ends ( A) of rigid members ( ) extending from apexes ( A) of the A-frame structures ( ) are attached to the platform ( ) by compliant members ( A, B). The platform ( ) is also attached to the substrate ( ) by a compliant member ( C). The A-frame structures ( ) are separately pivotable about bases ( B) thereof. Each pair of actuators ( ) is coupled through a yoke ( ) and displacement multiplier ( ) to one of the A-frame structures ( ) and is separately operable to effect pivoting of the A-frame structures ( ) with respect to the substrate ( ) by equal or unequal angular amounts. Upon pivoting, the A-frame structures ( ) act as lever arms to both lift the platform ( ) and tilt the platform ( ) with respect to the substrate ( ) with at least one degree of freedom. Since the platform ( ) lifts up from the surface of the substrate ( ), it may be tilted at large angles with respect to the substrate ( ).