The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2004
Filed:
Oct. 17, 2002
Applicant:
Inventor:
Nobushige Araki, Kanazawa, JP;
Assignee:
Murata Manufacturing Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/982 ;
U.S. Cl.
CPC ...
H01L 2/982 ;
Abstract
A surface acoustic wave device includes a piezoelectric substrate and interdigital electrode portions disposed on the piezoelectric substrate. A functional film including at least one of a silicon nitride film, a silicon oxide film, and a silicon oxide nitride film is formed on the piezoelectric substrate having the interdigital electrode portions such that the functional film is formed on at least a portion of the interdigital electrode portions by an electron cyclotron resonance sputtering method.