The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6831048 B1

PDF
Full Text
Expired
Date of Patent:
Dec. 14, 2004

Filed:

Oct. 23, 2002
Applicant:
Inventors:

Takehiko Kezuka, Settsu, JP;

Mitsushi Itano, Settsu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/50 ;
U.S. Cl.
CPC ...
C11D 7/50 ;
Abstract

A cleaning composition comprising (1) at least one of fluoride salts and hydrogendifluoride salts; (2) an organic solvent having a hetero atom or atoms; and (3) water; a method of cleaning metal gate, contact hole, via hole and capacitor using the composition; a method of cleaning a residual polymer derived from a resist using the composition; and a method of cleaning after CMP using the composition.


Find Patent Forward Citations

Kezuka, Takehiko. (2004). Detergent composition (U.S. Patent No. 6831048). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6831048

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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