The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2004
Filed:
Jul. 09, 2002
Michael J. DeBar, Rochester, NY (US);
Christopher N. Delametter, Rochester, NY (US);
Edward P. Furlani, Lancaster, NY (US);
Eastman Kodak Company, Rochester, NY (US);
Abstract
An actuator is made by depositing an electrode layer on an initial layer. A patterned layer of sacrificial material is formed on the first electrode layer such that a region of the first electrode layer is exposed through the subsequent layer. A second electrode layer is deposited and patterned on the subsequent layer. Then, a third patterned layer of sacrificial material is formed on the second electrode layer with an opening there through to the exposed region of the first electrode layer. A structure is deposited, patterned and planarized on the third layer expose a surface of the third layer. A third electrode layer is deposited and patterned on the planarized structure and the exposed surface of the third layer. The sacrificial material is partially removed, whereby the first electrode layer, the structure, and the third electrode layer are free to move together relative to the second electrode layer.