The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 07, 2004

Filed:

Oct. 16, 2003
Applicant:
Inventor:

Gilles Delapierre, Grenoble, FR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/984 ;
U.S. Cl.
CPC ...
H01L 2/984 ;
Abstract

The integrated electromechanical microstructure comprises a base substrate and a cavity closed by a protective cover. Means for adjusting the pressure in the cavity after the protective cover has been sealed comprise at least one element made of pyrotechnic material combustion whereof releases gas into the cavity. The pressure in the cavity can thus be adjusted independently from the sealing process. Selective ignition of the elements made of pyrotechnic material can be achieved by heating electrical resistors or by laser beams coming from outside the microstructure and directed selectively towards the elements made of pyrotechnic material through a transparent zone of the protective cover.


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