The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2004
Filed:
Apr. 11, 2002
Applicant:
Inventors:
Charles W. Lentz, Reading, PA (US);
Bettina A. Nechay, Allentown, PA (US);
Abdallah Ougazzaden, Breinigsville, PA (US);
Padman Parayanthal, Clinton Township, Hunterdon County, NJ (US);
George J. Przybylek, Douglasville, PA (US);
Assignee:
TriQuint Technology Holding Co., Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/9225 ;
U.S. Cl.
CPC ...
H01L 2/9225 ;
Abstract
The present invention provides an optoelectronic device and a method of manufacture thereof. In one embodiment, the method of manufacturing the optoelectronic device may include creating a multilayered optical substrate and then forming a self aligned dual mask over the multilayered optical substrate. The method may further include etching the multilayered optical substrate through the self aligned dual mask to form a mesa structure.