The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 07, 2004

Filed:

Dec. 26, 2000
Applicant:
Inventor:

Stephen M Lord, Encinitas, CA (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/600 ;
Abstract

A fluidized bed reactor with one or more stages each stage having a heating section located below a reacting section and a mechanism that pulses granules back and forth between the heating and reacting sections, separate injectors for silicon containing gases non silicon containing gases, heaters to heat the non silicon containing gases above the reaction temperature and the silicon containing gases to a temperature just below their decomposition temperature. The heater for the silicon containing gases controls the condensing vapor of a heat transfer fluid to a temperature below the decomposition temperature of the silicon containing gases. An enclosed noncontaminating sieving device selectively removes product and recycles undersize material. A weigh cell with frequency analysis capability provides information on the weight of the reactor and the force exerted by the pulsing action of the granules.


Find Patent Forward Citations

Loading…