The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Sep. 29, 2000
John Chong, Santa Barbara, CA (US);
Seung Bok Lee, Ithaca, NY (US);
Noel MacDonald, Santa Barbara, CA (US);
Robert Lewis, Santa Barbara, CA (US);
Peter Hunt, Scotts Valley, CA (US);
Calient Networks, Inc., San Jose, CA (US);
Abstract
Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same are disclosed. The shaped electrodes utilize its three-dimensional geometry to shape an electric field for electrostatic actuation for MEMS devices. For example, the height, width, length, sidewall slope, and layout of the shaped electrodes can be used to provide an optimum electric field in moving a MEMS mirror device. The shaped electrodes can provide electrostatic actuation at a low operating voltage and provide an optimum electric field for maximum tilt or angular range of motion for a MEMS mirror device. The shaped electrodes can be fabricated simply by using a pillar wafer and an electrode wafer. The pillar wafer can be used to form pillars as electrodes, or, alternatively, as barriers. A single substrate can also be used to form pillars and electrodes.