The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Dec. 11, 2000
International Business Machines Corporation, Armonk, NY (US);
Abstract
The invention provides methods and apparatus for substrate inspection and other lighting applications. It includes an lighting apparatus which comprises: an illuminator including a light source for emitting lights ; supporting means for supporting an object (e.g. a patterned substrate) having a finely patterned surface on which predetermined patterns are formed, which is illuminated at a predetermined angle with the lights from the illuminator ; and determining means for determining whether or not predetermined patterns on the surface of the object (substrate) are deformed using lights diffracted by the finely patterned surface , wherein the illuminator applies two kinds of lights each having a narrow wavelength range with a peak wavelength at a respective one of two complementary colors.