The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 30, 2004

Filed:

Jun. 20, 2001
Applicant:
Inventors:

Yakov Kogan, Wayland, MA (US);

Parviz Tayebati, Boston, MA (US);

Daryoosh Vakhshoori, Cambridge, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract

Apparatus and methods are provided for automated semiconductor device probing. The apparatus includes a probe assembly; a machine vision system; and a semiconductor support fixture. A method includes providing apparatus for automated semiconductor device probing; locating the semiconductor device positioned on the semiconductor support fixture with the machine vision system; guiding the movement of at least one of the probe assembly and the semiconductor support fixture so as to position a contact portion of the semiconductor device and the electrical probe in alignment with one another; and moving at least one of the probe assembly and the semiconductor support fixture toward the other of the at least one of the probe assembly and the semiconductor support fixture so as to position the electrical probe and the contact portion of the semiconductor device in electrical connection with one another.


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