The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Jun. 25, 2002
Kazutaka Yanagita, Kanagawa, JP;
Mitsuharu Kohda, Kanagawa, JP;
Kiyofumi Sakaguchi, Kanagawa, JP;
Akira Fujimoto, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention is to appropriately separate a bonded substrate stack regardless of some distortion in the bonded substrate stack or the like. This separating apparatus includes a position adjusting mechanism ( ) for adjusting the position of a nozzle ( ) which ejects a fluid. A bonded substrate stack ( ) is separated while changing the level of the nozzle ( ) stepwise by the position adjusting mechanism ( ) in accordance with a program which is set in advance on the assumption that the bonded substrate stack ( ) has a distortion within a predetermined range.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile