The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Sep. 13, 2001
Applicant:
Inventors:
David W. Minsek, Pleasantville, NY (US);
Daniel J. Nawrocki, Worcester, MA (US);
Assignee:
MicroChem Corp., Newton, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C 1/72 ;
U.S. Cl.
CPC ...
G03C 1/72 ;
Abstract
A composition useful as a lift-off resist comprising at least one solvent, at least one polydimethylglutarimide (PMGI) resin and at least one selected deep-UV absorbing molecule of Formula I, where X is an aromatic or aliphatic bridging group, and Ar and Ar′ are aryl groups wherein at least one Ar or Ar′ contains one or more hydroxyl or carboxylic acid groups