The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Mar. 14, 2003
Marcel Tognetti, Dresden, DE;
Infineon Technologies AG, Munich, DE;
Abstract
The invention relates to a method for generating ultrapure steam by oxidation of hydrogen in a closed torch with separate feed lines for hydrogen and oxygen and a discharge line for discharging the steam which is formed to a process chamber. The invention also relates to an arrangement for carrying out the method. The invention is intended to provide a method which is simple to implement and an arrangement for generating ultrapure steam which results in a significantly extended injector service life. For this purpose, oxygen and water are fed to the torch in a slightly superstoichiometric ratio, and pure additional oxygen is admixed with the steam formed during the combustion, when it enters the process chamber, in order to generate a considerable excess of oxygen in the steam. The associated device comprises a torch with feed lines for feeding hydrogen and oxygen to the closed torch and a discharge line leading to a process chamber. Each feed line being assigned a mass flow controller. The discharge line leading to a process chamber is connected to an additional oxygen feed line, which is also provided with a mass flow controller.